SAM® 1480/2480 G2 SERIES

G2 models satisfy the demand for the next generation of semiconductor production.

FEATURES

• Multi-gas, multi-range selection
• Valve shut-off function
• Self calibration function

BENEFITS

• Shortening gas purge time needed
• Complete gas shut-off
• Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
• Reduction of gas surge
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investment and inventory liability
• Performance maintained after gas change